UMTC Substrate Process Flow Intro

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Unimicron 7bc0fe8f05087632311212bd Introduction of Detail Substrate Manufacturing Process

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CSP Product

Surface Finish CONFIDENTIAL

2L Subtractive Process Flow

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CSP Product

Surface Finish CONFIDENTIAL

Manufacturing Process of 2L STD DesignDrilling Drilling
Cu Plating
Pretreatment
Electroless Copper Plating
Electrolytic Copper Plating
Lithography
Pretreatment
D/F Laminate
Exposuring
Developing
Etching
Stripping
AOI
AOI/VRS
Solder Mask
Pretreatment
S/M Printing
Precure
Exposuring
Developing
Postcure
Ni/Au Plating
Pretreatment
Nickel Plating
Strike Au Plating
Au Plating
Cleaning
Routing
Routing
Visual Inspection
Final Clean
Visual Inspection
Packaging/Storage
Packaging
Storage
Ship to customer
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CCL Glass Fiber Cloth

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Panel Plating - PretreatmentPanel Release
Pretreatment
Electroless Copper Plating
Electrolytic Copper Plating
Mechanical Drill
Panel Plating
Lithography
AOI
Refer to P. 49Solder Mask
Electrolytic Ni / Au Plating
Desmear
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
8
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Panel PlatingPanel Release
Pretreatment
Electroless Copper Plating
Electrolytic Copper Plating
Mechanical Drill
Plating CuPanel Plating Lithography
Cu foilRefer to P. 49
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Electroless Cu
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
9
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Lithography – PretreatmentPanel Release
Pretreatment
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Microroughness
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
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Lithography – Dry film laminatePretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Photo Resist
Panel Plating
Lithography
AOI
Refer to P. 50Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
Trace Pitch 60/60 50/50 40/40
Dry film type Thicker Medium Thinner11
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Lithography – Mask coveredPretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Mask
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
MaskCONFIDENTIAL
World Class Quality
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Lithography – ExposurePretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
UV LightMechanical Drill Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
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Lithography – DevelopingPretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Cured Photo resist
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
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Lithography – EtchingPretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Space (Etched)
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
15
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Lithography – StrippingPretreatmentPanel Release
D/F Laminate
Exposuring
Developing
Etching
Stripping
Mechanical Drill
Bond finger & trace
Capture pad
Panel Plating
Lithography
AOI
Refer to P. 51Solder Mask
Electrolytic Ni / Au Plating
Routing
Solder ball pad
Final Visual Inspection & FQC
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CONFIDENTIAL
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AOI – Auto Optical InspectionPanel Release
Illumination
CCD Camera
Illumination
Mechanical Drill
Reflection
Panel Plating
Lithography
AOI
Refer to P. 52Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
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Open

Short

Scratch Protrusion

Void

Solder mask – Pretreatment (MEC Etch)PretreatmentPanel Release
S/M Printing
Precure
Exposuring
Developing
Mechanical Drill
CZ Solution
Panel Plating
Lithography
AOI
Refer to P. 53Solder Mask
Electrolytic Ni / Au Plating
CZ Solution
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
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Solder mask - PrintingPretreatmentPanel Release
S/M Printing
Precure
Exposuring
Developing
Mechanical Drill
Solder mask
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
20
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Solder mask – Mask and exposurePretreatmentPanel Release
S/M Printing
Precure
Exposuring
Developing
Mechanical Drill
Mask
Panel Plating
Lithography
AOI
Solder Mask
Electrolytic Ni / Au Plating
Routing
Final Visual Inspection & FQC
World Class Quality
CONFIDENTIAL
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