掺Al的纳米Si-SiO2复合薄膜的光学非线性特性

更新时间:2023-04-23 13:22:01 阅读量: 实用文档 文档下载

说明:文章内容仅供预览,部分内容可能不全。下载后的文档,内容与下面显示的完全一致。下载之前请确认下面内容是否您想要的,是否完整无缺。

采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0e-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被

第!"卷!第#期!$$%年#月

半!导!体!学!报

&'()*+*,-./)01-2+*3(&-)4.&5-/+

6789!"!)79#

!$$%3:;

"

0&+2*+#7.F%*$72'.&#.%*#/&"(2G>&#)+$G-*G-*F&3&/*%#1*23/@;BBBB

MVM!

Z :YC7'?ICI:IHI8HIIEX:IHPHIOeO1O[O

M9).."")@()%'$&,)(6-,"(-"$(2D(,(""%,(1$,$)3(,4"%/,&K!$!M 97,($ 1$(K7)1!W8**88 HI5 J

!@(/&,&1&")6"',-)(21-&)%/ 97,("/"L-$2"'6-,"(-"/ =",,($$$"W 97,($ *5)*<8!M

5(6/%.7$%G?I7I8HI?:=7AH@:8=7?=AH?B7J08RE7?EI@R+HR+H-7P7BHA?JH8PBG:S?F??IHIS?BAH:A?ECBHIAG?!@DDDDDOO

AHP?R=?B78S?EJ7C=RQ:S?PHaHI?@GIHC?QHAG:J?PA7B?@7IE8:B?=95G?7JJR=?B7I:IAAGH=ER7=E?=I7I8HI?:=BCBROAe

_M$

BC:A"$$IP95G?=?8:a:AH7IAHP?7JAG?7AH@:8I7I8HI?:=HAHIAG?JH8PBHB@?AHFH8HAHB7FB?=S?EA7F?M`$cM$?D;D;

:BBG7=A:BK$JB95G?7AH@:8I7I8HI?:=HAHB?IG:I@?EEC?A7AG?eC:IACP@7IJHI?P?IA7J?8?@A=7IBHI+HI:I7@=BRD;;

H8PB95G??IG:I@?E7AH@:8I7I8HI?:=HA7?BI7A7=HHI:A?J=7P08E7:IAF?@:CB?A:8B?PF?EE?EHIAG?+H-!JD;EOD

AG?=?:=?I708@8CBA?=BHIAG?JH8PB9 + @ 8#&.)/HI:I7@=BA:8B7P7BHA?JH8PBAGH=ER7=E?=I7I8HI?:=HAAHP?R=?B78S?EJ7C=RQ:S?PHaHI9:;D;O

'(;;%"#$Y%"K#'%"T%

- 0!!!( ;<;+=36#.TW%!!!>&$=3#+%$&)#.%*$2#?> $!#WRTM%%!$$%$#R$KT$R$#

4?+%.&)=$%*&+!

3:A?=H:8BQHAG8:=?AGH=ER7=E?=7AH@:8I7IROD

8HI?:=HAIEJ:BA=?B7IB?AHP?:=??BB?IAH:8J7=;:D

M

G7A7IH@E?SH@?BBC@G:B:88R7AH@:8BQHA@G?B9DD5G?AGH=ER7=E?=I7I8HI?:=7AH@:8=?B7IB?HIDDB?PH@7IEC@A7=I:I7:=AH@8?B?PF?EE?EHI:IHIBCRD8:AHI?EHCPG:B=?@?HS?E?aA?IBHS?:AA?IAH7I9OP

!

ZCP7A7"&$.97FB?=S?E7AH@:8FHBA:FH8HAID;H&E++?RE7?EO8:BB?BQHAG!#BBQHA@GHI?M_?DDOAHP?9N?@:CB?7JAG?A?@GI787H@:8HP7=A:I@?7JOD =?:AHIA?=?BAG:B:=HB?IHI+HI:I7@=BA:8B I@R+HO; +H?PF?EE?EHI+H-H8PBJ7=P?EFH7IHP8:IR!J;DA:AH7I:IED8:BP:R?IG:I@?E@G?PH@:8S:7=E?7RDD

W##

BHAH7I <*&64 9/?@?IA8Q?=?7=A?E7I;D

AG?I7I8HI?:=7AH@:8=?B7IB?7JI@R+HR+H-H8PB!JDD

K

=?:=?EF2P:I?A=7I@7RBCAA?=HI3:IDD;/ODO9;Q:B7JE7HIH8H@7I7aHE?JH8PBG:S?:8B7F??I;DOB:8H?EA7:ECBAAG??8?@A=7IBA=C@AC=?:IEA7HPRDD>

%

=7S?AG?BA:FH8HAIE?JJH@H?I@9XC"&$.9=?RD;:;7=A?EAG:AAG?7IB?A7JFH:BS78A:?:BQ?88:BAG?DOHIA?IBHAJ?8?@A=78CPHI?B@?I@?@7C8EF?HPR;7=7S?EFEEHI?=A:HI:P7CIA7J08HIA7AG?D;:O:@

7P7BHA?BH8H@7I7aHE?JH8PB908RE7?EI@R+HR+H-!@DD

JH8PB@7C8EF?D=7PHBHI:A?=H:8BJ7=+HRF:B?EOP

MK

G7A7?8?@A=7IE?SH@?:8H@:AH7IB9+ACEH?B7IDDDHABAGH=ER7=E?=I7I8HI?:=BCB@?AHFH8HAIE=?8:a:RD;:

AH7IAHP?G:S?B?8E7PF??I=?7=A?E9(IAGHBD:RD

?=Q?CB?AG?AHP?R=?B78S?EJ7C=RQ:S?PHaHIDO 2X3 A?@GIHC?QHAG:J?PA7B?@7IE8:B?=A7eBACEG?7AH@:8I7I8HI?:=HAH?B7J08RE7?EI@R+HR;ADD

7P7BHA?JH8PB9+H-!@D0ICPF?=7J=?B?:=@G?=BG:S?P?:BC=?EAG?AGH=ER7=E?=I7I8HI?:=BCB@?AHFH8HAG=7CGP:ID;AO;P?AG7EBHIB?S?=:8AHP?=?H7IB9(I@7P:=HB7IODQHAGAG?MRB@:IP?AG7E AG?2X3A?@GIHC?@:IeF?CB?EA7BACE7A7I8G?I7I8HI?:=BCB@?AHR;I;ADFH8HACAAG?=?8:a:AH7IAHP?:BQ?8895=:IBH?IA;F@7G?=?IAB?@A=7B@7:BF??IHI@=?:BHI8B?EDD;GO;CA7HIS?BAH:A?AG?D=7?=AH?B7JAG?HIA?=:@AH7IB:RODP7I:=H7CB?8?P?IA:=a@HA:AH7IBHIB?PH@7IROS;?EC@A7=B9(IAG?AQ7RC8B?B?8JREHJJ=:@A?E2X3?aRD

AG?AQ7DC8B?B@=?:A?:A=:IBH?IAO=:AR?=HP?IABD

HIIEAG?EHJJ=:@A?EBHI:8HBP?:BC=?EHI:O:O

"

5G?A=:IBH?IAO=:ARF:@^=7CIERJ=??EH=?@AH7I9O

HI?@GIHC?HB:D7Q?=JC8A778J7=BACEHIG?OAe;OAI7I8HI?:=7AH@:8=7?=AH?B7JB?PH@7IEC@A7=P:RDDDA?=H:8B9X?CB?AGHBA?@GIHC?A7BACE7AGAG?e;FAGH=ER7=E?=I7I8HI?:=BCB@?AHFH8HAIE=?8:a:AH7ID;:AHP?7J08RE7?EI@R+HR+H-7P7BHA?JH8PB9!@DD

@A#.*3#+%!!B

/2P:I?A=7I@7RBCAA?=HIIEAG?=P:8:IRODO:I?:8HI?=?CB?EA7D=?:=?AG?08RE7?EI@R+HROQDD

=7?@ABC7=A?EFG?):AH7I:8):AC=:8+@H?I@?27CIE:AH7I7J&GHI: )79K$WWK$M$"<>DD;A

V&7==?B7IEHICAG7=9*P:H8GC7C9?EC9@I!GDO:eOe

?@?HS?EL,:IC:=$$% =?SHB?EP:ICB@=HA=?@?HS?EK3:=@G!$$%!/;!D

$$%&GHI?B?(IBAHACA?7J*8?@A=7IH@B"!

采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0e-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被

第#期 YC7'?ICI"&$.F7I8HI?:=-AH@:8<=7?=AH?B7J08R47?EI@R+HR+H-7P7BHA?2H8PB!)!&OeDDDD

")!

+H-7P7BHA?JH8PB90I"$PP+H-8:A?Q:B!@!DD

CB?E:BAG?A:=?A@7IA:HIHI?S?=:8+H@GHB:IEOOBD08@GHB7IAG?BC=J:@?95G?A7A:8BC=J:@?:=?:7JD+H@GHB:IEAG?A7A:8BC=J:@?:=?:7J08@GHBDD@7C8EF?@G:I?EA7:ECBAAG?@7IA?IAB7J+H:IEO>08HIAG?JH8PB95G?F:@^=7CIES:@CCP:IEBCAROD

_T

C=?0==?BBC=?BQ?=?KcM$:IEA?=HI:B DDOO

W`$<:=?B?@AHS?895G?/2D7Q?=Q:BW$$X95G?D;08RE7?E+HR=H@G7aHE?JH8PBQ?=?E?7BHA?E7IDDQ:S?S?@A7=B IE IA?=J?=?EHI:B:P8?A7M:!HD

=7EC@?:EHJJ=:@A?EF?:PHIAG?EH=?@AH7I WgD

L

! 95G?P:IHACE?7JAG?EHJJ=:@A?EBHI:8!_MOOHIAG?EH=?@AH7I :BAG?I=?@7=E?E:B:JCI@AH7IWQ

+HI:8BE?A?@A?EFG7A7R7JAG?AHP?E?8:O;:D;G9

EH7E?Q?=?:P8HJH?EF7@^RHI:P8HJH?=:IED;:8DAG?IB?IAHIA7:@7PCA?=9D

C#/=2%/7+))*/$=//*&+!D

M$$ 7=H?IA?EDRA;D?+HBCFBA=:A?B7=BH8H@:O8:BBB8H@?B95G?IAG?:BRE?D7BHA?EJH8PBQ?=?:II?:8?EHIIHA=7O?I:PFH?IA:AEHJJ?=?IAA?PD?=:AC=?BJ7=W$PHI9

\R=:;E

HJJ=:@AH7I \/4 P?:BC=?P?IABQ?=?@:==H?E7CAQHAG:N=C^?=4"0ES:I@?\R=:;EHJRJ=:@A7P?A?=9\R=:;DG7A7?PHBBH7IBD?@A=7B@7D; \<+ Q:BP?:BC=?EQHAG:<'([C:IACP!$$$B@:IIHIO*+&0PH@=7D=7F?95G?8HI?:=7DAH@:8:FRB7=DAH7ID=7D?=AH?B7JAG?JH8PBQ?=?P?:BC=?EQHAG:.IH@7.6R!"$$'BD

?@A=7P?A?=9-DAH@:8I7I8HI?:=HAH?B7J08RE7D

?EI@R+HR+H-!JH8PBQ?=?P?:BC=?EQHAG:AHP?R=?B78S?EJ7C=RQ:S?PHaHIOB?ACDHIAG?f?;1:F7=:A7=;7J-DAHR@:8:IE3:OI?AH@/?B7I:I@?+D?@A=7B@7D;:A*:BA&GHI:)7=P:8.IHS?=BHA;95G??aD?=HP?IA:8B?ACDHBBG7QIHI2HO

`M95G??a@HA:AH7IB7C=@?Q:B:BD?@A=:RDG;

BH@B5H B:DDGH=?J?PA7B?@7IE8:B?=QHAG:@?IA=:8Q:S?8?IO

AG7J"$$IP DC8B?RQHEAG7J:F7CAL$JB:IE=?D?AHAH7I=:A?7JM^']95G??aR@HA:AH7ID7Q?=Q:BK$PX95G?8:B?=F?:PQ:B

BD8HAHIA7AQ78HI?:=8;D

:=:88?8D78:=H]?EF?:PB 7I?F?:P:BD=7F? QGH@GQ:BE?8:;?EF;GQ

HAG=?BD?@AA7:I7AG?=F?:P:BDCPD :IEAG?IAG?AQ7BD8HAF?:PBBD:AH:88;7S?=8:DD

?E7IAG?B:PRD8?9(IAGHBA?@GIHe

C? AQ7DC8B?E8:B?=F?:PBQHA

G2HO9M!*aD?=HP?IA:8B?ACDJ

7=2X3P?:BC=?P?IAB QG?=?N+HB:F?:PBD

8HAA?= :IE3M 3!:IE3W:=?AG?=?J8?@AHS?PH==7=B9

5G?7DAH@:8F:IEO:DDO@:IF??BAHP:A?EF;ACE;HIOAG?E?D?IE?I@?7JAG?:FB7=DAH7I@7?JJHRH?IA"7IHI@HE?IADG7A7I?I?=O;7#95G?=?8:RH7IBGHDHBOHS?IF;

"7# ! #

A= 7#EDO

! QG?=?=HB:@7IBA:IA92HOC=?!BG7QBAG:AAG?DO7=AG?JH8PB:II?:8?E:A"$$ L$$ :IEM$$$bHB

@:8@C8:A?EA7F?!`%! !`TW :IE!`WK?6 =?BD

?@RHS?8;95GHBHIEH@:A?BAG:AAG?BP:88?=AG?:S?=:O

?H]?7J+HI:I7@=;BA:8B AG?8:=O?=AG?7D

AH@:8F:IEO:DE

C?A7eC:IACP@7IJHI?P?IAR=?8:A?E?JJ?@AB9I7C=2X3?aD

?=HP?IA AG?HI@HE?IADG7A7I?IR?=O;@7==?BD7IEHIOA7:I?a@HA:AH7IDC8B?@?IA=:8Q:S?8?IOAG7J"$$IPHBBP:88?=AG:IAG?7DAH@:8F:IEO:D

9

2HO9!!/?8:AH7IBGHDF

?AQ??I "7# M

!

:IE7#7J08RE7D

?EI@R+HR+H-!JH8P:II?:8?E:AEHJJ?=?IAA?PD?=:RAC=?B

5G?2X3BHOI:8:B:JCI@AH7I7JAG?E?8:;

HP?GJ7=08RE7D

?EI@R+HR+H-!JH8PHBBG7QIHI2HO

`W HIQGH@GAG?E7ABE?DH@AAG??aD?=HP?IA:8E:A::IEAG?@C=S?HBAG?JHAAHIO7

J:Y:CBBH:ICI@AH7I9(I:AQ7R8?S?8B;

BA?P QG?IAG?8:B?=D

C8B?QHEAGHBD=7aHP:A?A7AG?A=:IBS?=B?=?8:a:RH7IAHP? AG?@7==?8:AH7IBHO

I:8HBAG?@7IS78CAH7I7JAG?8:B?=DC8B?QHAGF=7:E?I?EB;BA?PB L

9.BHIO

B@AJAB(AJA

采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0e-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被

")#

半!导!体!学!报第!"卷

AG?E?@7IS78CAH7IP?AG7E AG?=?8:a:AH7IAHP?HB?S:8C:A?EA7F?K$JB95HP?RE?8:;?EJ7C=RQ:S?PHaRHIOA?@GIHeC?G:BF?@7P?:IHPD

7=A:IAA778J7=HIS?BAHO:AHIOE?DG:BHIOD=7@?BB?BHIO:B?B B78HEB :IEO8:BB?B95G?A?PD

7=:8?S78CAH7I7JAG?2X3BHOI:8P:;;H?8EHIJ7=P:AH7I:F7CAAG?DG:B?=?R8:a:AH7ID=7@?BB?B:IEAG?I:AC=?7JAG??a@HA?EBA:A?B9N?@:CB?AG??8?@A=7IRD

G7I7IHIA?=:@AH7IAHP?HB7IAG?7=E?=7JM$$JB MM

D

G7I7ID=7@?BB?B:=?I7A?aD?@A?EA7F?HPD7=A:IAHIAGHBBACE;95G?C8A=:J:BA7DAH@:8=?BD7IB?HIEH@:A?BAG?E7PHI:I@?7J@:==H?=R@:==H?=B@:AA?=HIO:BAG?D=HI@HD:8E?DG:BHIOP?@G:IHBPJ7=AG?08RE7D?EI@R+HR+H-!JH8PB

9

2HO`W!2X3BHOI:8J7=08RE7D

?EI@R+HR+H-!JH8PS?=RBCBE?8:;A

HP?G0@@7=EHIOA

7AG?=?J?=?I@?P?:BC=?P?IAA?@GIHeC? AG?AGH=ER7=E?=BCB@?DAHFH8HA;$ W

+7

JAG?08RE7D?EI@R+HR+H-!JH8PQ:BP?:BC=?E=?8:AHS?A7&+! :=?J?=?I@?B:PD8?F;Q

GH@GAG?EHJJ=:@A?EBHOI:8Q:B7FA:HI?ECIE?=HE?IAH@:8@7IEHAH7IB9 W

+@:IF?@:8@C8:A?ECBHIOAG??e

C:AH7I $

M!

! #

$ $ +#/+A$ $ +

"

2 #/@/(/2C!E?

E"

2 # QG?=?@/:IE@+:

=?AG?D?:^S:8C?B7JAG?EHJRJ=:@A?EBHO

I:87J&+!:IEAG?B:PD8?=?BD?@AHS?8; (/:IE(+:=?AG?@7==?BD7IEHIO=

?J=:@AHS?HIEHR@?B 2/HBAG?8?IO

AG7J&+! :IE2HBAG?AGH@^I?BB7JAG?B:PD

8?95G?S:8C?7J(/HBM`K! :IEAG?S:8C?7J$ W

/J

7=&+!G:BF??I?BAHP:A?EA7F?M`$cM$_MW

?BC7IAG?J?PA7B?@7IEAHP?B@:8?F;

3HI7BGHP:"&$.9 MW

92=7P*e9

! AG?S:8C?7J$ W +HB?S:8C:A?EA7F?M`$cM$_M$

?BC95G?HI@HE?IADG7A7I?I?=O;HI7C=2X3?aD?=HP?IAHBBP:88?=AG:IAG?7DAH@:8F:IEO:D9

.IE?=AGHB7JJR=?B7I:IA?a@HA:AH7I@7IEHAH7I AG?8HI?:=:FB7=D

AH7I:A"$$IPHBQ?:^ QG?=?:BAQ7RDG7A7I:FB7=D

AH7IHBAG?7=HOHI7JAG?I7I8HI?:=:FB7=DAH7I MT

95G?AG?=P:8?JJ?@AHB:BBCP?EA7F?I?O8HO

HF8?HIAG?J?PA7B?@7IE=?O

H7I95G?=?J7=? AG?S:8C?7JAG?I7I8HI?:=BCB@?DAHFH8HA;B

G7C8EF?@87B?=A7AG?=?R:8S:8C?9<=:^:BG"

&$.9BACEH?EAG?AGH=ER7=E?=I7I8HI?:=BCB@?DAHFH8HA;$ W

7JBH8H@7II:I7@=;BA:8B?PF?EE?EHIAG?+H-!P?EHCPF;AG?MRB@:IP?AG7ECBHIO:J?PA7B?@7IE8:B?=:AQ:S?8?IO

AG7J"MWIP95G?:FB78CA?S:8C?B7J$ W

:

=?HIAG?=:IO

?J=7PM$_M$

A7M$_L?BCQG?IAG?BH8H@7II:I7@=;

BA:8BH]?S:=H?BJ=7P!A7$`#IP M

9-C==?RBC8AJ7=$ W

7J08RE7D?EI@R+HR+H-!HB7JAG?B:P?7=E?=7JP:OIHACE?:BAG:A=?D7=A?EF;<

=:^:BG95G?I7I8HI?:=7DAH@:8D=7D?=AH?B:=?@87B?8;=?8:A?EA7P:A?=H:8BA=C@AC=?95G?BA=C@AC=?7JAG?JH8PBQ:B@G:=:@A?=H]?EF;\/4:

IE\<+9(I\/4D:AA?=IB7JAG?JH8P:II?:8?E:A"$$b

AG?=?HB:D?:^:A!%$K

Lh QGH@G@:IF?HIE?a?E:BAG?+H

T$$ EHJJ=:@AH7ID?:^95G?=?HBI7EHJJ=:@AH7ID?:^=?8:A?EA70895G?:S?=:O?BH]?7J+HI:I7R@=;BA:8EH:P?A?=HIAG?JH8PB:II?:8?E:A"$$ L$$ :IEM$$$b@:IF??S:8C:A?EJ=7PAG?2X'37JAG?EHJJ=:@AH7I8HI?BA7F?%`M L`# :IEM$`TIP

=?BD?@AHS?8; :@@7=EHIOA7AG?+@G?==?=J7=PC8:!g$`L& '@7B% QG?=?&HBAG?Q:S?8?IOAG7JAG?\R=:;B7C=@?:IE'HBAG?2X'3HI=:EH:IB7JAG?\R=:;EHJJ=:@AH7ID?:^:AAG?EHJJ=:@AH7I:IO8?%95GHBHIEH@:A?BAG:AAG?GHOG?=AG?:II?:8HIOA

?PRD?=:AC=? AG?8:=O?=AG?:S?=:O

?BH]?7J+HI:I7R@=;BA:8B95G?:S?=:O?BH]?7J+HHI08RE7D?EB:PRD8?BHB8:=O?=AG:IAG:AHICIE7D?EB:PD

8?B:AAG?B:P?:II?:8HIOA?PD

?=:AC=? K

F?@:CB?08RHIEC@?E@=;BA:88H]:AH7IA:^?BD8:@?EC=HIOA

G?=P:8:II?:R8HIO M$

9

5G?@7PD7BHAH7I7J:JH8PBA=HDD?EF;:I0=i

Q:BP?:BC=?EF;\<+92HOC=?TBG7QBAG?@G:=:@RA?=HBAH@BD?@A=:7J08!D:IE+H!D95G?AQ7D?:^B7JAG?+H!D@G:=:@A?=HBAH@BD?@A=::ALL`K:IEM$W?6@7==?BD

7IEA7?8?P?IA:8BH8H@7I:IEBH8H@7IEH7aRHE? =?BD?@AHS?8; M$

9\/4:IE\<+=?BC8ABBG7QAG?J7=P:AH7I7J+HI:I7@=;

BA:8B?PF?EE?EHIAG?+H-!P

:A=Ha9[C:IACP@7IJHI?P?IA7J?8?@A=7IBHII@R+H@7C8E?IG:I@?AG?I7I8HI?:=7DAH@:8D=7D?=RAH?B7JAG?JH8PB95G?@G:=:@A?=HBAH@D?:^7J08!DBG7QBAG:AAG?D?:^D7BHAH7IHB%#`!#?6 @7==?R

BD7IEHIOA7AG:A7J08- ?M$

925(/BD?@A=:7J08R+HR+H-!JH8P:IE+HR+H-!JH8P:=?BG7QIHI2HO`#9(I@7PD:=HB7IQHAGCIE7D

?EJH8P J7=08R+HR+H-!

采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0e-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被

第#期 YC7'?ICI"&$.F7I8HI?:=-AH@:8<=7?=AH?B7J08R47?EI@R+HR+H-7P7BHA?2H8PB!)!&OeDDDD

")$

JH8PAG?=?HB:I:FB7=AH7ID?:^:AK%#@P_M@7==?RD

B7IEHI7AG?+HR-R08BA=?A@GHIHF=:AH7IDOAOSP7E?9\<+:IE25(/=?BC8ABHIEH@:A?AG:A08E7RHIIAG?JH8PBHB7aHEH]?E9X:I&$.9=77B?EDOHO"DD

08:A7PB@7C8EA:^?-7CAAG:AEC=HIII?:8HIO:O K

7J+H-7J7=P:8CPHI:M9X?^I7QAG:AAG??IR!AG:I@?E7AH@:8I7I8HI?:=HA7?BI7A7=HHI:A?D;EOJ=7P08I:I7:=AH@8?BF?@:CB?AG?=?:=?I708D@8CBA?=BHIAG?JH8PB

9

M#

&7AA?="&$.FCB?EAG?AQ7RF:IE?JJ?@AHS?RP:BBP7E?8P7EHJH?EA7HI@7=7=:A?AG??JJ?@A7JDC:IACP@7IJHI?P?IA:IEJ7CIEAG:AAG?eC:IACPe@7IJHI?P?IA7J?8?@A=7IBHIBP:88B?PH@7IEC@A7=:=AH@8?B@:CB?BAG?I7I8HI?:=7AH@:8=7?=AH?BHIDDDDAG?7JJR=?B7I:IA=?HP?A7EHJJ?=P:=^?E8=7PO;JAG7B?7JFC8^B?PH@7IEC@A7=B95G?=?:8:IEHP:HRO

I:=:=AB7J$W:=?EH=?@A8?8:A?EA7AG?I7IR;D;=8HI?:==?J=:@AHS?HIE?a:IEAQ7RG7A7I:FB7=AH7IDD

2HO9#!25(/BD

?@A=:7J08R+HR+H-!JH8P:IE+HR+H-!JH8P

@7?JJH@H?IAB =?BD?@AHS?8;9<=:^:BG"&$.FD

=?B?IA?E:B;BA?P:AH@BACE;7

IAG?@7==?8:AH7IF?AQ??IGH=ER7=E?=I7I8HI?:=BCB@?DAHFH8HA;$ W

BH8H@7II:I7@=;BA:8BH]? 8HI?:==?J=:@AHS?HIE?a :IE7DAHR:8F:IEO:D M

95G?H=BACE;BCOO?BABAG:A8:=O?GH=ER7=E?=I7I8HI?:=@7?JJH@H?IAB7FB?=S?EJ7=P:88I:I7@=;

BA:8B:=?EC?A7:IHI@=?:B?EeC:IRCP@7IJHI?P?IA?JJ?@A9(IAGHBBACE;

\/4:IE\<+=?BC8ABBG7QAG?J7=P:AH7I7J+HI:I7@=;

BA:8B?PF?EE?EHIAG?+H-!P:A=Ha95G??IG:I@?E7D

AHR:8I7I8HI?:=HA;HIAG?08RE7D?EI@+HR+H-!JH8PB@:IF?:AA=HFCA?EA7AG=??REHP?IBH7I:8eC:IACP

@7IJHI?P?IA M# 95G?S:8C?7J$ W

HI08RE7D?E:PD8?BHBBP:88?=AG:IAG:AHIAG?CIE7D

?EB:PRD8?B K 95GHBHB:B@=HF?EA7AG?8:=O?=:S?=:O?BH]?7JI@R+HHI08RE7D?EB:PD8?BHI@7PD:=HB7IQHAGG:AHICIE7D?EB:PD8?BEC?A7AG?eC:IACP@7IRHI?P?IA?JJ?@A9

!;

&+$2=/*&+/2P:OI?A=7I@7RBDCAA?=HIO:IEAG?=P:8:IRI?:8HIOQ?=?CB?EA7D=?D:=?08RE7D?EI@R+HR+H-!@7PD7BHA?JH8PB95G?I7I8HI?:=7DAH@:8D=7D?=AH?B7JAG?JH8PBQ?=?BACEH?ECBHIOAHP?R=?B78S?E2X395G?7JJR=?B7I:IAI7I8HI?:=HA;HBD=?E7PHRI:IA8;?8?@A=7IH@HI7=HOHI95G?C8A=:J:BA7DAH@:8?BD7IB?HIEH@:A?BAG?E7PHI:I@?7J@:==H?=R@:==HR?=B@:AA?=HIO:BAG?D=HI@HD:8E?DG:BHIOP?@G:RIHBP95G?7DAH@:8I7I8HI?:=HA;HB?IG:I@?EEC?A7eC:IACP@7IJHI?P?IA7J?8?@A=7IBHI+HI:I7@=;

BR:8B?PF?EE?EHI+H-!JH8PB9D#"#.#+$#/

M !6H>:;

:<=:^:BGY &:]]:I?88H3 Y:FC==7U ?A:891HI?:=:IEI7I8HI?:=7DAH@:8D=7D?=AH?B7JD8:BP:R?IG:I@?E@G?PHR@:8RS:D7=E?D7BHAH7IO=7QIBH8H@7II:I7@=;

BA:8B9,37E?=I-D

AH@B !$$! TL %ML ! !ZCP7A75 2C^CBGHP:+ fCF7E?=:f9-FB?=S:AH7I7J7D

AH@:8FHBA:FH8HA;HI&E+?+?M_?RE7D?EO8:BB?BQHAG!#RD

B?@BQHA@RGHIOAHP?9-D

A1?AA ML"% M! "W!A@ABA@BAJE=A

采用时间分辨四波混频方法,用钛宝石飞秒激光器测量了掺Al的纳米Si-SiO2复合薄膜的光学非线性特性.得到薄膜非共振三阶非线性极化系数为1.0e-10esu,弛豫时间为60fs.分析认为薄膜的光学非线性增强来源于SiO2镶嵌的纳米Si中电子的量子限制效应,而不是来源于Al杂质,这是因为Al易被

"))

半!导!体!学!报第!"卷

W H::8:^BGPH+Y=?F?8' (F:8U ?A:890=AHJH@H:8EH?8?@R!6>;e

A=H@BI7I8HI?:=D=7?=AH?B7J+HI:I7@8CBA?=BJ7=P?EF7ID;H HP8:IA:AH7IHI+H-MLL" "T 8:BB:A=Ha9,08<GB!OD;PDD;K#$!

T :7I^:=3 UG:IY=?F?8' ?A:89)7I8HI?:=7AH@:8!0>OOZ D=7?=AH?B7J@7G?=?IA:==:JBCFPH@=7I+H-G?=?B 7R!BDD;7D

:8?PF?EE?EQHAG+HI:I7:=AH@8?B908<GB1?AAMLLL DDD;D%# M#W!

# H::<=:^:BGY &:]]:I?88H3 Y:FC==7U ?A:89)7I8HI?:=!6>;

7AH@:8D=7?=AH?B7JBH8H@7II:I7@=BA:8BO=7QIF8:BP:RDD;;D

?IG:I@?E@G?PH@:8S:7=E?7BHAH7I9,08<GB!$$! LM DDDD;

TK$%

K!YC7' X:I7I8HI?:=7AH@:8=?B7IB?7JI@R+HR+H-!O[9)DD

JH8PBBACEH?EQHAGJ?PA7B?@7IEJ7C=RQ:S?PHaHIA?@GIHC?9Oe

&GHI<GB1?AA!$$K !W !L"L;

% 7IUGC?1,?A:89/77PRA?P?=:AC=?!XC\3 4OZ3 OD

SHBHF8??8?@A=78CPHI?B@?I@?7J08RE7?EBH8H@7I7aHE?JH8PB9D !$$M %" TM!M08<GB1?AADD;

" HP4++G:G,4:P?I5& ?A:89.ICBC:8887QA?P7=:8!f;BD

?S78CAH7I7JJ?PA7B?@7IEJ7C=RQ:S?RPHaHIBHI:8BHIHIA=HIROO

H=?@A?SHE?I@?J7=AG?E7PHI:I@?BH@Y:0BeC:IACPQ?88BE

MLL! KL !%!#7JHIA?=:@AH7I?JJ?@AB9<GB/?S1?AA;

L :I+CIU UG:I+?A:89)7I8HI?:=7AH@:8=7?=AH?B!XOZ ODDD

7J*=RE7?E%#)FR!$5?-R#UI-O8:BB?B9&GHI-A!-W!-#!DD

1?AA!$$T ! M$L

M$H[HI,HI,HI'C':H87I?A:8908RHIEC@?E@=BA:88H]:R![OOO;

AH7I7JGE=7?I:A?E:P7=G7CBBH8H@7IJH8PB9,7C=I:87J;OD

!$$# !# M #% HI&GHR6:@CCP+@H?I@?:IE5?@GI787O;

祁青 金晶 胡海龙 等9 I?B?08诱导:R+H'薄膜的晶化9真空科学与技术 !$$# !#M#%

MM?@^?=<& 2=:IHA7'1 N=HA7&=C]&' ?A:892?PA7B?@R!NO

7IEDG7A7I?@G7?BJ=7PF:IERA7RF:IEA=:IBHAH7IHIY:0B9

<GB/?S1?AAMLL"KMMKT%;

M!:746Y1) 0=:IE:2,/7:@G,2 ?A:895GH=E I7I8HIR!/

?:=7AH@:8HIA?=:@AH7IB7JB7P?F?I]7=G=HIB908<GBDDD;DD;

1?AAMLLM #" M!TM

MW HI7BGHP:f 5:HH3 f7F::BGH592?PA7B?@7IEAHP?R=?R!3>;

B78S?EHIA?=J?=7P?A=7=AG?E?A?=PHI:AH7I7J@7P8?a;JD

I7I8HI?:=BCB@?AHFH8HA9-A1?AAMLLM MK MK"WD;D

MTC7'?ICI 1HI+G:IaHI X:IHPHI9<G7A78CPHI?BR!YOeOO[O

@?I@?:IE:8H@:AH7I7JI7I8HI?:=7AH@:8=7?=AJI@R+HRDDDDD;7

+H-H8PB9&GHI?B?,7C=I:87J+?PH@7IEC@A7=B!$$K !%!!J郭亨群 林赏心 王启明9纳米+WT# HI&GHI?B? H镶嵌半导体学报 +H-!薄膜的发光与非线性光学特性的应用9

!$$K !%!WT#

M#7AA?=4 NC=A3Y 3:IIHI9N?87QRF:IER:GH=ER7=R!&O/,ODA

E?=7AH@:8I7I8HI?:=HAJI:I7P?A?=RBH]?B?PH@7IEC@A7=D;7

LL!K"M!$$@=BA:88HA?B9<GB/?S1?AAM;;

MK:ICIA:7&G?IZC:I UG:I7=CH?A:89*JJ?@AB7JE7R!XO+ON

HI8HIA7+H-I?8?@A=78CPHI?B@?I@?J=7P0CI:I7P?R!7DO0

A?= +H-+H+H-R+HBA=C@AC=?9&GHI?B?,7C=I:87J+?PHR!! D

王孙涛 陈源 张@7IEC@A7=B!$$M !!!MKM HI&GHI?B?伯蕊 等9在+ 纳米 H-8对0C+H-+H+H-R+H!中掺0!! D

结构电致发光的影响9半导体学报 !$$M!!!MKM

"掺(2的纳米-*G-*F@复合薄膜的光学非线性特性

VM!

郭亨群M !杨琳琳!王启明

M华侨大学信息科学与工程学院 泉州!WK!$MM !中国科学院半导体研究所 北京!M$$$"W

摘要 采用时间分辨四波混频方法 用钛宝石飞秒激光器测量了掺08的纳米+HR+H-!复合薄膜的光学非线性特

_M$

性9得到薄膜非共振三阶非线性极化系数为M 弛豫时间为K分析认为薄膜的光学非线性增强来源`$cM$?BC$JB9而不是来源于0这是因为0薄膜中没有形成0于+H-H中电子的量子限制效应 8杂质 8易被氧化 8!镶嵌的纳米+团簇9

关键词 纳米+ 复合薄膜 三阶非线性 时间分辨四波混频H

'(;; %"#$Y %"K#' %"T%中图分类号 - TW%!!!文献标识码 0!!!文章编号 $!#WRTM%%!$$%$#R$KT$R$#

批准号 K$WWK$M$"国家自然科学基金资助项目

V通信作者9*P:H8GC7C9?EC9@I!GeOe$$%R$MR$L收到 !$$%R$WR$K定稿!!

$$%中国电子学会"!

本文来源:https://www.bwwdw.com/article/lftq.html

Top