东进光科胶DNR-L300-D1(21.8)(中文) - rev.0

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物 質 安 全 資 料 表 Material Safety Data Sheet 1) ) 产品名称 : DNR-L300-D1(21.8) (负光阻)

Product Name: DNR-L300-D1(21.8)(Chemically amplified Negative resist) 2) 建議用途及限制使用 : Advisable use and Restriction

A. 建議用途: Photoresist for semicunductor High viscosity polymeric material 3) 制造者 / 供货商信息

Manufacturer/Supplier/Distributor information

A. 制造商名称 Company : DONGJIN SEMICHEM Inc. B. 制造商地址 Address :

625-3, Yodang-Ri, Yanggam-Myeon, Hwaseong-Si, Gyeonggi-Do, KOREA C. 紧急联络电话/传真 Emergency response number :

电话TEL:TAIWAN : (04) 7580475 KOREA : ++82-31-353-6340 传真FAX:TAIWAN : (04) 7580473 KOREA : ++82-31-353-6339 D. 部门Division:半导体开发部门SEMI-CONDUCTOR, YOUNG SAM KIM E. 供货商名称Supplier name:

台湾东进化成股份有限公司TAIWAN DONGJIN SEMICHEM CO., LTD F. 供货商地址Supplier address:

台湾省 彰化县伸港乡蚵寮村彰滨工业区线工北一路21号

No. 21 Hsiengong north 1st Rd, Changbin ind. Complex, Chang Hua Hsien,

509 Taiwan, R.O.C

2. 危害辨识数据 HAZARD IDENTIFICATION 1) 物品危害分類 Hazard classification :

第3级 易燃液体 Flammable liquids Cat 3

第1级 眼睛严重损伤/刺激眼睛 Serious eye damage/ eye irritation Cat 1

1. 1. 物品與廠商資料 CHEMICAL PRODUCT AND COMPANY IDENTIFICATION 1/19

2) 標示內容 Allocation label elements A. 象征符号 Symbol :

B. 警示语 Signal word: 危險 Danger C. 危害险声明 Hazard statements - 导致严重的眼睛损伤 Causes serious eye damage - 易燃液体和蒸气

Flammable liquid and vapour

D. 危害防範措施 Precautionary statements - 预防 Prevention

? P210远离热/火花/明火/热的表面 - 禁止抽烟。

P210 Keep away from heat/sparks/ open flames/ hot surfaces.- No smoking ? P233保特容器紧紧关闭。 P233 Keep container tightly closed. ? P240容器接地和接受设备。

P240 Ground/bond container and receiving equipment. ? P241使用防爆电子或通风的照明设备或配备。

P241 Use explosion-proof electrical/ventilating/ lighting/equipment. ? P242 使用不爆火花的工具。 P242 Use only non-sparking tools. ? P243预先警戒措施预防静电。

P243 Take precautionary measures against static discharge. ? P280穿戴防护手套/衣服/护目镜/脸部防护。

P280 Wear protective gloves/cloths/ eye protection/face protection.

- 緊急救護 Response

? P303+P361+P353衣服(或头发):立刻去除或脱掉所有污染的衣物,用大量水冲洗

皮肤。

P303+P361+P353 If on skin (or hair): Remove/ take off immediately all contaminated

clothing. Rinse skin with water/shower.

? P370+P378在火灾的情况下:使用干粉、二氧化碳、泡沫灭火器或喷水扑灭。 P370+P378 In case of fire: Use dry chemical, carbon dioxide, water spray or regular foam for extinction.

2/19

? P305+P351+P338眼睛:使用大量水谨慎冲洗几分钟。若允许请先除去隐形眼镜,

持续冲洗。

P305+P351+P338 If in eyes: Rinse cautiously with water for several minutes. Remove

contact lenses, if present and easy to do. Continue rinsing.

? P310立即呼叫医生、医师或到危害中心。使用泡沫消灭。 P310 Immediately all a POISON CENTER or doctor/physician

- 保管 Storage

? P403+P235储存品放置在通风及保持凉快的地方。 P403+P235 Store in a well-ventilated place. Keep cool. - 处置 Disposal

? P501处置溶剂和容器的法规章程(需符合地方/地区/国家/国际的法规章程。) P501 Dispose of contents/container to (in accordance with local/regional/ national/

international regulations.)

E. 在危险分类中没包括的其它危险信息:

Other hazard information not included in hazard classification: - NFPA评估系统:健康0 燃烧性3 反应性0

- NFPA Rating system: Health 0 Flammability 3 Reactivity 0

3. INGREDIENT INFORMATION 成分 Components S1(Confidential) 機密 名称 e 樹脂 NOVOLAK RESIN 化學文摘社登記號碼 PCT (WT)(%) Common namCAS No. 機密 Confidential 20~30 S2(Confidential) 機密 光酸發生劑 PAG 機密 Confidential 0.1~0.5 S3(Confidential) 機密 S4(Confidential) 機密 環己酮 CYCLOHEXANONE AMINE SURFACTANT CYCLOHEXANONE 機密 Confidential 機密 Confidential 108-94-1 < 0.1 < 0.1 6~15 丙二醇甲醚醋酸酯 PROPYLENE GLYCOL MONOMETHYL ETHER PGMEA 107-98-2 50~65 ※ 上面内容为商业秘密,禁止泄露于其它公司。 The information above is trade secret so that leak is prohibited to the other 3/19

companies. 4. 急救措施 FIRST AID MEASURES A. 眼睛接觸 Eye contact:

- 立刻用水或食盐水冲洗眼睛至少15分钟,经常缩回眼皮。

For minimum 15 minutes washes with the many double meaning water. - 直接治療。 Get immediate medical attention.

B. 皮膚接觸 Skin contact: - 立刻去除污染的衣物和鞋子。

- 用肥皂和大量水或温热水洗涤受影响的范围。如果刺激持续,立刻寻求治疗。

After quickly removing the clothing which is imbrued and shoes etc. washes with the water and the soap.

- 在使用之前,彻底的清洗和烘干污染的衣物和鞋子。

Launder and dry contaminated clothing and shoes thoroughly before reuse.

C. 吸入 Inhalation:

- 立刻让新鲜空气流通并且保持受害者的温暖与安静。

Immediately moves with the place which has the fresh air. - 直接治療。 Get immediate medical attention.

D. 吞食 Ingestion:

- 如果受害者有知觉,喝一两杯水并且与医师联系。 - 不要導致嘔吐。

In order to drink the case water which will be ceremony and according to medical advice induces a vomit.

- 直接治療。 Get immediate medical attention.

E. 深刻/慢性作用和症状: Acute/chronic effects and symptoms:

呼吸器刺激 ,皮肤刺激 ,眼睛刺激 。

Respiratory organ magnetic pole, Skin magnetic pole, Eye magnetic pole.

F. 对医师的忠告 Advice to physician:

- 如果呼吸是不顺畅或终止,给予氧气并且执行人工呼吸。

If breathing is irregular or stopped, give oxygen and administer artificial respiration. - 选择适当的清洗场所。

Considers intake at the time of place washing.

4/19

5. 灭火措施 FIRE FIGHTING MEASURES A. 適用滅火劑 Extinguishing media: - 化学干粉、二氧化碳、酒精泡沫、水。 Dry chemical, CO2, Alcohol foam, water

B. 危险从化学制品:(例:危险的燃烧产品)

Hazards from chemical product : (Ex: hazardous combustion products) - 形成氧化碳和二氧化碳。

Forming carbon oxide and carbon dioxide. - 如果吸入氧化碳,可能导致致命。 If inhaled, carbon oxide may fatal.

- 如果二氧化碳过度浓密,会产生窒息现象。 If concentrated, carbon dioxide uses as asphyxiant.

C. 防护服装和消防:

Protective clothing and fire fighting:

- 在进入通风闭合的空间之前,注意消防和风的方向。

Notice direction of the wind for fire fighting and ventilate closed spaces before entering. - 如果您能从火灾范围移动容器,并且没有风险。

Move containers from fire area if you can do it without risk. - 从最大距离开始灭火或使用自动软管浇淋或监控喷管。

Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. - 灭火之后,以大量水冲洗让容器冷却降温。

Cool containers with flooding quantities of water until well after fire is out.

- 桶槽上方的通风口保险装置产生的音量过大或使用过久导致或色变,若有这些情 况,尽速撤离。

Withdraw immediately in case of rising sound from venting safety devices or discoloration of tank. - 桶槽离火灾范围远一点。

ALWAYS stay away from tanks engulfed in fire.

- 对于大型的火灾,使用自动软管浇淋或监控喷管;如果没有发生,从火灾外围区 域慢慢浇息。

For massive fire, use unmanned hose holders or monitor nozzles; if this is impossible,

withdraw from area and let fire burn.

5/19

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